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Proceedings Paper

Optical methods for the measurement of MEMS materials and structures
Author(s): Xiaoyuan He; Xin Kang; Chenggen Quan; Cho Jui Tay; Shihua Wang; Huai Min Shang
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Paper Abstract

In this paper, optical methods for the surface profile and deformation measurement of MEMS materials and structures are introduced. The methods are based on the digital image correlation, interferometry and fringe projection. The deformations of a micro-mirror and a micro-beam are measured by phase shifting fringe projection and interferometry. The surface profile of an electrode pad was used for the demonstration of the microscopic surface contouring. For the MEMS material test, using a long working distance microscope and digital speckle correlation method the tensile strain of a thin copper wire is measured.

Paper Details

Date Published: 29 May 2002
PDF: 6 pages
Proc. SPIE 4537, Third International Conference on Experimental Mechanics, (29 May 2002); doi: 10.1117/12.468778
Show Author Affiliations
Xiaoyuan He, Southeast Univ. (China)
Xin Kang, Southeast Univ. (China)
Chenggen Quan, National Univ. of Singapore (Singapore)
Cho Jui Tay, National Univ. of Singapore (Singapore)
Shihua Wang, National Univ. of Singapore (Singapore)
Huai Min Shang, National Univ. of Singapore (Singapore)


Published in SPIE Proceedings Vol. 4537:
Third International Conference on Experimental Mechanics

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