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Proceedings Paper

Micromachined fiber optic-to-Mach-Zehnder interferometer coupling via SiON channel waveguide
Author(s): Lukasz Nieradko; Christophe Gorecki; Andrei Sabac; Jean Claude Jeannot
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Paper Abstract

In this article we present a new micromachined platform for coupling the optical fibers to waveguides of Mach-Zehnder interferometers, supporting fibers in the same wafer as a waveguide wafer. Using standard CMOS technologies, like a UV photolithography, KOH wet etching of Si(100) wafer, sputtering of metal layers, RIE etching the fabrication of a very precise platform is demonstrated.

Paper Details

Date Published: 15 April 2003
PDF: 6 pages
Proc. SPIE 4943, Fiber-based Component Fabrication, Testing, and Connectorization, (15 April 2003); doi: 10.1117/12.468517
Show Author Affiliations
Lukasz Nieradko, Univ. de Franche-Comte (France)
Christophe Gorecki, Univ. de Franche-Comte (France)
Andrei Sabac, Univ. de Franche-Comte (France)
Jean Claude Jeannot, Univ. de Franche-Comte (France)


Published in SPIE Proceedings Vol. 4943:
Fiber-based Component Fabrication, Testing, and Connectorization

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