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Proceedings Paper

Gripping tool for MEMS assembly with an absolute distance measurement sensor using a fiber optic WL interferometer with high measuring frequency
Author(s): Tilo Pfeifer; Ubaldo Aleriano; Frank Depiereux
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Paper Abstract

Reduction in the size of produced parts, increases the difficulty for precise manufacturing observation-processes and it makes manufacturing control cycles even more complex. Among all the production steps for micro-systems, assembly seems to be specially affected with this manufacturing handicap. Usual sensors used for the macro-world have to be modified or redesigned in order to address its use for the micro-world. This document presents the integration of a white light interferometer into a flexible fibre-scope used already for process monitoring purposes and which is mounted into a gripping-tool. The goal is to achieve a linear measurement between a gripping-tool and a target-part during the assembly process of hybrid micro systems.

Paper Details

Date Published: 25 March 2003
PDF: 11 pages
Proc. SPIE 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly, (25 March 2003); doi: 10.1117/12.468417
Show Author Affiliations
Tilo Pfeifer, RWTH-Aachen (Germany)
Ubaldo Aleriano, RWTH-Aachen (Germany)
Frank Depiereux, Fraunhofer-Institut fuer Produktionstechnologie (Germany)


Published in SPIE Proceedings Vol. 4945:
MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly

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