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Proceedings Paper

Porous silicon microcavities for sensing purposes: modeling and experimental results
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Paper Abstract

On exposure at different chemical substances several physical quantities of porous silicon, such as reflectivity, photoluminescence, and electrical conductivity, change drastically. In particular, we have used porous silicon microcavities as chemical sensors, measuring resonant peak shifts in the reflectivity spectra due to capillary condensation of the vapor in the silicon pores. Understanding sensor behaviour depends on the dielectric function model and on the interaction mechanism assumed. With proper choices, we can also quantitatively characterize the Porous Silicon Microcavity sensing device features.

Paper Details

Date Published: 11 March 2003
PDF: 6 pages
Proc. SPIE 4946, Transducing Materials and Devices, (11 March 2003); doi: 10.1117/12.468376
Show Author Affiliations
Luca De Stefano, CNR (Italy)
Ivo Rendina, CNR (Italy)
Luigi Moretti, Univ. delgi Studi di Reggio Calabria (Italy)
Andrea M. Rossi, Istituto Elettrotecnico Nazionale Galileo Ferraris (Italy)


Published in SPIE Proceedings Vol. 4946:
Transducing Materials and Devices

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