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Proceedings Paper

Three-dimensional integration of vertically coupled microring resonator filters: fabrication and wavelength trimming technologies
Author(s): Yasuo Kokubun
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Paper Abstract

We have proposed and demonstrated a vertically coupled microring resonator filter as an Add/Drop wavelength filter. The ultra-compact ring resonantor can be realized by the ultra-high index contrast waveguide (=34%) consisting of glass core (n=1.80) and air cladding and the vertically coupled configuration, where a microring resonator with a few tens micron radius is stacked on the crossing point of cross-grid bus waveguides. The cross-grid topology of busline waveguides and very small ring radius enables a dense integration of filter circuit. To achieve the 3D integration, we developed a novel fabrication process of flat-top waveguide using a so-called lift-off process and the SOG (Spin-On-Glass), and successfully obtained a very smooth and flat surface of lower waveguide with a step height less than 0.01μm. In addition, to manipulate the center wavelength after fabrication, we developed two trimming methods; one is the use of UV-sensitive polymer for the over-cladding, and the other is the direct UV irradiation to the ring ocre made of Ta2O5-SiO2 compound glass. Utilizing the former method, the channel spacing of filter array was precisely controlled within 0.5nm, which can not be achieved by the control of ring radius.

Paper Details

Date Published: 3 April 2003
PDF: 14 pages
Proc. SPIE 4944, Integrated Optical Devices: Fabrication and Testing, (3 April 2003); doi: 10.1117/12.468308
Show Author Affiliations
Yasuo Kokubun, Yokohama National Univ. (Japan)


Published in SPIE Proceedings Vol. 4944:
Integrated Optical Devices: Fabrication and Testing

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