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Proceedings Paper

Silicon oxynitride waveguides developed for optomechanical sensing functions
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Paper Abstract

In the last decade, the advances in the MEMS technology lead to the integration of optical structures with MEMS. This association between MEMS technologies and integrated optical structures may provide complex functionality such as sensing, modulation or switching. Optical MEMS integrated on silicon are very attractive in terms of potential for cheap mass production and compatibility with CMOS technologies. In this paper we present the technology of SiON waveguide fabrication including aspects of PECVD and micromachining. PECVD process optimisation in order to increase the waveguide performances is presented. Finally the integrated opto-mechanical sensing structures are discussed.

Paper Details

Date Published: 3 April 2003
PDF: 5 pages
Proc. SPIE 4944, Integrated Optical Devices: Fabrication and Testing, (3 April 2003); doi: 10.1117/12.468293
Show Author Affiliations
Andrei Sabac, IMFC Univ. de Franche-Comte (France)
Michal Jozwik, IMFC Univ. de Franche-Comte (France)
Lukasz Nieradko, IMFC Univ. de Franche-Comte (France)
Christophe Gorecki, IMFC Univ. de Franche-Comte (France)


Published in SPIE Proceedings Vol. 4944:
Integrated Optical Devices: Fabrication and Testing

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