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Proceedings Paper

Three-dimensional microfabrication with femtosecond laser pulses
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Paper Abstract

Investigations on two-photon polymerization of inorganic-organic hybrid materials initiated by femtosecond Ti:sapphire laser pulses are performed. The applied resins are designed for ultraviolet photo-lithography and contain photo-initiators sensitive to 390 nm radiation. These resins exhibit exceptionally good mechanical, optical, and chemical properties and can be microstructured by laser-enforced transition from liquid to solid state. These materials are transparent in the infrared, therefore, by tightly focusing femtosecond laser pulses into the volume of a liquid resin, two-photon polymerization can be initiated in a small focal region inside the liquid. First applications of this technique for the fabrication of three-dimensional microstructures and photonic crystals in inorganic-organic hybrid polymers with a structure size down to 200 nm and a periodicity of 450 nm are discussed.

Paper Details

Date Published: 15 April 2003
PDF: 4 pages
Proc. SPIE 4941, Laser Micromachining for Optoelectronic Device Fabrication, (15 April 2003); doi: 10.1117/12.468235
Show Author Affiliations
Jesper Serbin, Laser Zentrum Hannover e.V. (Germany)
R. Houbertz, Fraunhofer-Institut fuer Silicatforschung (Germany)
Carsten Fallnich, Laser Zentrum Hannover e.V. (Germany)
Boris N. Chichkov, Laser Zentrum Hannover e.V. (Germany)

Published in SPIE Proceedings Vol. 4941:
Laser Micromachining for Optoelectronic Device Fabrication
Andreas Ostendorf, Editor(s)

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