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Proceedings Paper

Surface defect detection and classification with light scattering
Author(s): Michael Gebhardt; Horst Truckenbrodt; Bernd Harnisch
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Paper Abstract

The quality of smooth technical surfaces is characterized by the surface roughness and by surface defects. For a stable quality control, objective measuring conditions are necessary. The objective measurement of surface defects especially is an unsolved problem. For the investigation of the scattering characteristics of different surface defects, a measuring device was developed. With this measuring device, the type of defect and the angle dependent scattering intensity were measured and compared with theoretical calculations.

Paper Details

Date Published: 1 October 1991
PDF: 9 pages
Proc. SPIE 1500, Innovative Optics and Phase Conjugate Optics, (1 October 1991); doi: 10.1117/12.46822
Show Author Affiliations
Michael Gebhardt, Friedrich-Schiller-Univ. (Germany)
Horst Truckenbrodt, Friedrich-Schiller-Univ. (Germany)
Bernd Harnisch, Friedrich-Schiller-Univ. (Germany)

Published in SPIE Proceedings Vol. 1500:
Innovative Optics and Phase Conjugate Optics
Rolf-Juergen Ahlers; Theo T. Tschudi, Editor(s)

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