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Proceedings Paper

Optical profilometry using spatial heterodyne interferometric methods
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Paper Abstract

Surface measurement technology's growing demand for fast and highly accurate data processing and representation results from the need to automate measuring processes and to raise quality control requirements in production. Measuring micro and macro profiles as well as surface roughness in production-related areas is a task that increasingly faces industrial production. Optical and particularly interferometrical methods of micro and macro surface investigation are especially favorable by virtue of their ability to measure without physical contact and therefore nondestructively and with high speed.

Paper Details

Date Published: 1 October 1991
PDF: 10 pages
Proc. SPIE 1500, Innovative Optics and Phase Conjugate Optics, (1 October 1991); doi: 10.1117/12.46820
Show Author Affiliations
Gottfried Frankowski, UBM Messtechnik GmbH (Germany)

Published in SPIE Proceedings Vol. 1500:
Innovative Optics and Phase Conjugate Optics
Rolf-Juergen Ahlers; Theo T. Tschudi, Editor(s)

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