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Proceedings Paper

Loss mechanisms in MEMS oscillators
Author(s): Joseph F. Vignola; Harry J. Simpson; Xiao Liu; Brian H. Houston; Douglas M. Photiadis; Martin Marcus; Jacek Jarzynski; Bojan Ilic; Dave Czaplewski; Lidija Sekaric; James E. Butler
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Paper Details

Date Published: 22 May 2002
PDF: 12 pages
Proc. SPIE 4827, Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2002); doi: 10.1117/12.468196
Show Author Affiliations
Joseph F. Vignola, Naval Research Lab. (USA) and SFA, Inc. (United States)
Harry J. Simpson, Naval Research Lab. (United States)
Xiao Liu, Naval Research Lab. (USA) and SFA, Inc. (United States)
Brian H. Houston, Naval Research Lab. (United States)
Douglas M. Photiadis, Naval Research Lab. (United States)
Martin Marcus, Naval Research Lab. (United States)
Jacek Jarzynski, Naval Research Lab. (USA) and SFA, Inc. (United States)
Bojan Ilic, Cornell Univ. (United States)
Dave Czaplewski, Cornell Univ. (United States)
Lidija Sekaric, Cornell Univ. (United States)
James E. Butler, Naval Research Lab. (United States)


Published in SPIE Proceedings Vol. 4827:
Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications

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