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Proceedings Paper

Network-connected MEMS measuring system for high-speed data transfer to CAD and simulation tools
Author(s): Christian Rembe; Rishi Kant; Michael P. Young; Richard S. Muller
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Paper Abstract

We describe an advanced interferometric testing system that we have built at the Berkeley Sensor & Actuator Center (BSAC) at the University of California, Berkeley. The system provides live dynamic views of microelectromechanical devices as well as precise measurements of their motions in three dimensions. A high-speed interface feeds these signals to an ultra-high-performance network (SuperNet), which can deliver them to remote locations where they can, for example, be compared to simulations. An illustrative example using a nonlinear oscillating microactuator demonstrates the utility of the system.

Paper Details

Date Published: 22 May 2002
PDF: 9 pages
Proc. SPIE 4827, Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2002); doi: 10.1117/12.468188
Show Author Affiliations
Christian Rembe, Polytec GmbH (Germany)
Rishi Kant, Univ. of California/Berkeley (United States)
Michael P. Young, Univ. of California/Berkeley (United States)
Richard S. Muller, Univ. of California/Berkeley (United States)


Published in SPIE Proceedings Vol. 4827:
Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications
Enrico Primo Tomasini, Editor(s)

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