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Proceedings Paper

Network-connected MEMS measuring system for high-speed data transfer to CAD and simulation tools
Author(s): Christian Rembe; Rishi Kant; Michael P. Young; Richard S. Muller
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Paper Details

Date Published: 22 May 2002
PDF: 9 pages
Proc. SPIE 4827, Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2002); doi: 10.1117/12.468188
Show Author Affiliations
Christian Rembe, Polytec GmbH (Germany)
Rishi Kant, Univ. of California/Berkeley (United States)
Michael P. Young, Univ. of California/Berkeley (United States)
Richard S. Muller, Univ. of California/Berkeley (United States)


Published in SPIE Proceedings Vol. 4827:
Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications

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