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Proceedings Paper

Laser Doppler vibrometry for optical MEMS
Author(s): Eric M. Lawrence; Kevin Speller; Duli Yu
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Paper Abstract

The use of Laser Doppler Vibrometer (LDV) technology has been at the fore front of Micro Electro-Mechanical Systems (MEMS) research since the early 1990's. The art of the technology has culminated in our latest Micro Scanning Vibrometer (MSV) system for automated scan measurements on MEMS. One MEMS application driving our product development is the use for testing optical MEMS devices, such as optical switches used in the telecommunications industry. To exemplify this, we present measurements made in collaboration with Applied MEMS on their MEMS DuraScanTM mirror. For Applied MEMS, LDV characterization was important for validating the design intent for two-axis rotation of a single-gimbaled structure. Scan measurements reveal distinct, isolated rotational modes about x- and y-axes that can be used to constrain mirror motion in either direction. A key feature of the LDV is that it measures real-time transient response in typical operating conditions where both electrical and mechanical effects are present. Characterization of settling time performance shows that the mirror can be optimized for fast, accurate beam steering needed for applications like optical switching.

Paper Details

Date Published: 22 May 2002
PDF: 8 pages
Proc. SPIE 4827, Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2002); doi: 10.1117/12.468168
Show Author Affiliations
Eric M. Lawrence, Polytec PI, Inc. (United States)
Kevin Speller, Applied MEMS, Inc. (United States)
Duli Yu, Applied MEMS, Inc. (United States)


Published in SPIE Proceedings Vol. 4827:
Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications
Enrico Primo Tomasini, Editor(s)

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