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Proceedings Paper

Laser Doppler vibrometry for optical MEMS
Author(s): Eric M. Lawrence; Kevin Speller; Duli Yu
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Paper Details

Date Published: 22 May 2002
PDF: 8 pages
Proc. SPIE 4827, Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2002); doi: 10.1117/12.468168
Show Author Affiliations
Eric M. Lawrence, Polytec PI, Inc. (United States)
Kevin Speller, Applied MEMS, Inc. (United States)
Duli Yu, Applied MEMS, Inc. (United States)


Published in SPIE Proceedings Vol. 4827:
Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications

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