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Proceedings Paper

Reducing the mechanical hysteresis problem in optically addressed diaphragm pressure sensors
Author(s): S. A. Sharifian; D. R. Buttsworth
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Paper Abstract

Mechanical hysteresis problems associated with pressure sensors based on interferometric measurements of diaphragm deflection are discussed. The source and importance of each contribution to the net hysteresis is calculated and compared with experimental results. Possible methods to decrease hysteresis effects are presented. Based on these suggested methods, new sensors have been manufactured and their hysteresis evaluated. The results demonstrate that significant reductions in hysteresis can be achieved with minimum cost. Future sensor development will focus on materials selection and manufacturing methods to fully realize these improvements.

Paper Details

Date Published: 22 May 2002
PDF: 11 pages
Proc. SPIE 4827, Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 May 2002); doi: 10.1117/12.468141
Show Author Affiliations
S. A. Sharifian, Univ. of Southern Queensland (Australia)
D. R. Buttsworth, Univ. of Southern Queensland (Australia)


Published in SPIE Proceedings Vol. 4827:
Fifth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications

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