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Proceedings Paper

Integrating CD and lithographic process window analysis with mask data preparation for subwavelength ICs
Author(s): Devendra Joshi; Danny Keogan; James Kenneth Falbo
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Paper Abstract

As the industry accelerates the reduction in sub-wavelength device feature sizes, it is necessary that the traditional barriers between design, mask data preparation (MDP), and the lithography process be broken down or eliminated. These processes, which now possess increased levels of complexity and interconnectivity, can no longer work independently but must be linked and all applicable information about the processes propagated upstream. Options associated with phase shift masks, optical proximity correction, increasing constraints for the minimum defect size requirements, improving yield and throughput, etc. have been key to the increased demands placed on the photomask manufacturers. Knowledge of the lithographic performance of a selected option prior to mask build is key to reducing mask cost, improving turn around time and staying on the aggressive path established by the mask user. Integrating CD and lithographic process window analysis with MDP provides a convenient means of helping the mask makers to predict the performance of a mask within the wafer fab. This paper will discuss the integration of CD and lithographic process window analysis tools with CATS mask data preparation software. The benefits of implementing this methodology will be explored and illustrated with data.

Paper Details

Date Published: 27 December 2002
PDF: 9 pages
Proc. SPIE 4889, 22nd Annual BACUS Symposium on Photomask Technology, (27 December 2002); doi: 10.1117/12.467847
Show Author Affiliations
Devendra Joshi, Numerical Technologies, Inc. (United States)
Danny Keogan, Numerical Technologies, Inc. (United States)
James Kenneth Falbo, Numerical Technologies, Inc. (United States)

Published in SPIE Proceedings Vol. 4889:
22nd Annual BACUS Symposium on Photomask Technology
Brian J. Grenon; Kurt R. Kimmel, Editor(s)

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