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Proceedings Paper

Design of a calibration machine of optical two-dimensional length standards
Author(s): Bjorn Hemming; Ilkka Palosuo; Antti Lassila
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Paper Abstract

Optical measurements with coordinate measurement machines equipped with optical sensors, and video measurement machines, are clearly increasing in industry. Accurately manufactured two-dimensional standards, with a precision typically between 0.05 μm and 5μm, are used to check and calibrate these measuring machines. In order to start a calibration service for two-dimensional standards, a new calibration machine is currently under development at the Centre for Metrology and Accreditation (MIKES). In this paper we describe the mechanical design, properties and present a detailed uncertainty analysis of position measurement. By modeling and compensating mechanical error sources the required standard uncertainty level of 50 nm is achievable.

Paper Details

Date Published: 18 October 2002
PDF: 9 pages
Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); doi: 10.1117/12.467631
Show Author Affiliations
Bjorn Hemming, Ctr. for Metrology and Accreditation (Finland)
Ilkka Palosuo, Ctr. for Metrology and Accreditation (Finland)
Antti Lassila, Ctr. for Metrology and Accreditation (Finland)

Published in SPIE Proceedings Vol. 4902:
Optomechatronic Systems III
Toru Yoshizawa, Editor(s)

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