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Proceedings Paper

Surface profile measurement of concave-shaped mirror using grating projection method
Author(s): Masayuki Yamamoto; Masahito Tonooka; Toru Yoshizawa
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Paper Abstract

Specular objects with large shape-change such as the concave-shaped mirror are used in the several industrial fields. However, concave-shaped mirror is difficult to measure the surface profile with non-contact method. In this paper, we describe the profile measurement method for concave-shaped mirror such as an ellipsoidal mirror and an aspherical mirror. This measurement method, based on the grating projection method, employed two cylinder-type gratings with different radius; measurement time is shorter than that of contact-method. The surface of ellipsoidal mirror, one of the concave-shaped mirrors, is measured and repeatability accuracy is evaluated.

Paper Details

Date Published: 18 October 2002
PDF: 8 pages
Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); doi: 10.1117/12.467533
Show Author Affiliations
Masayuki Yamamoto, Tokyo Univ. of Agriculture and Technology (Japan)
Masahito Tonooka, Tokyo Univ. of Agriculture and Technology (Japan)
Toru Yoshizawa, Tokyo Univ. of Agriculture and Technology (Japan)


Published in SPIE Proceedings Vol. 4902:
Optomechatronic Systems III
Toru Yoshizawa, Editor(s)

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