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Proceedings Paper

Surface profiling method for large aspheres: diffraction image-forming approach
Author(s): Zhi Li; Yang Zhao; Dacheng Li
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Paper Abstract

Investigation of surface profiling method for large aspheres becomes more and more important and imperative with the great development of the synchrotron radiaiton facility (SRF), since the latter puts greater demands on surface quality, shape and figure parameters of the optical elements used in itself. MEanwhile, things became more difficult because of the unique characteristics of the optics used in SRF. As a result, novel surface measurement methods and systems have to be developed to cope with such problems.

Paper Details

Date Published: 18 October 2002
PDF: 8 pages
Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); doi: 10.1117/12.467512
Show Author Affiliations
Zhi Li, Physikalisch-Technische Bundesanstalt (Germany)
Yang Zhao, Univ. of Illinois/Chicago (United States)
Dacheng Li, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 4902:
Optomechatronic Systems III
Toru Yoshizawa, Editor(s)

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