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Proceedings Paper

Reflection moiré for high spatial resolution
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Paper Abstract

A new technique is proposed to keep a high spatial resolution when using both a reflection moire and using an integrating-bucket phase shifting method. In moire method an image includes high spatial frequency components of the gratings and the second harmonics of them besides moire fringe. These high frequency components cause measurement error when using phase shifting technique. By combining these two methods for a reflection moire we realized to eliminate both the high frequency components of gratings and the second harmonics of them with keeping high-speed measurement. We proved that theory of the new technique and good experimental results.

Paper Details

Date Published: 18 October 2002
PDF: 10 pages
Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); doi: 10.1117/12.467398
Show Author Affiliations
Hisatoshi Fujiwara, Yamatake Corp. (Japan)
Yukitoshi Otani, Tokyo Univ. of Agriculture and Technology (Japan)
Toru Yoshizawa, Tokyo Univ. of Agriculture and Technology (Japan)

Published in SPIE Proceedings Vol. 4902:
Optomechatronic Systems III
Toru Yoshizawa, Editor(s)

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