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Proceedings Paper

Tapping force measurement using micromachined cantilevers and laser systems
Author(s): Takeshi Hatsuzawa; Masanori Hayase; Toshiaki Oguchi
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Paper Abstract

Measurement of periodical contact force of the tapping stylus is very important for performance evaluation of soft material profilometry. So far, simulations are perfomred to estimate the force, and force calibration cantilevers are used to measure small contact force of AFMs. Since the tappign stylus uses larger tappign force compared to AFMs, micro cantilevers made of glass are developed for the force measuremetn of range from mN to μN.The levers are calibrated by using a standard cantilever made of silicon,which is fabricated by a micromachining process. A laser interferometre system is used for the calibration of glass cantilever spring constant. A laser Doppler vibrometer is used to measure the velocity of the cantilevers, and the force is estimated from the velocity signal by an integration.

Paper Details

Date Published: 18 October 2002
PDF: 8 pages
Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); doi: 10.1117/12.467331
Show Author Affiliations
Takeshi Hatsuzawa, Tokyo Institute of Technology (Japan)
Masanori Hayase, Tokyo Institute of Technology (Japan)
Toshiaki Oguchi, Tokyo Institute of Technology (Japan)


Published in SPIE Proceedings Vol. 4902:
Optomechatronic Systems III
Toru Yoshizawa, Editor(s)

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