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Proceedings Paper

Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile
Author(s): Osami Sasaki; Kunihiro Honma; Takamasa Suzuki
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Paper Abstract

An optical path difference (OPD) and the amplitude of sinusoidal wavelength-scanning are controlled with double feedback control system in an interferometer, so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. A linear CCD image sensor is used to measure one-dimensional step-profiles in real-time. Two different step profiles with a step height of 1 μm and 20 μm, respectively, are measured with the measurement error less than 8 nm. Measuring time for one measuring point is 0.04 s.

Paper Details

Date Published: 20 September 2002
PDF: 8 pages
Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); doi: 10.1117/12.465819
Show Author Affiliations
Osami Sasaki, Niigata Univ. (Japan)
Kunihiro Honma, Niigata Univ. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)

Published in SPIE Proceedings Vol. 4919:
Advanced Materials and Devices for Sensing and Imaging
Jianquan Yao; Yukihiro Ishii, Editor(s)

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