Share Email Print

Proceedings Paper

Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step profile
Author(s): Osami Sasaki; Kunihiro Honma; Takamasa Suzuki
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

An optical path difference (OPD) and the amplitude of sinusoidal wavelength-scanning are controlled with double feedback control system in an interferometer, so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. A linear CCD image sensor is used to measure one-dimensional step-profiles in real-time. Two different step profiles with a step height of 1 μm and 20 μm, respectively, are measured with the measurement error less than 8 nm. Measuring time for one measuring point is 0.04 s.

Paper Details

Date Published: 20 September 2002
PDF: 8 pages
Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); doi: 10.1117/12.465819
Show Author Affiliations
Osami Sasaki, Niigata Univ. (Japan)
Kunihiro Honma, Niigata Univ. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)

Published in SPIE Proceedings Vol. 4919:
Advanced Materials and Devices for Sensing and Imaging
Jianquan Yao; Yukihiro Ishii, Editor(s)

© SPIE. Terms of Use
Back to Top