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Proceedings Paper

Sinusoidal wavelength-scanning superluminescent diode interferometer for two-dimensional step-profile measurement
Author(s): Osami Sasaki; Yasuhisa Shimakura; Takamasa Suzuki
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Paper Abstract

Two-dimensional step-profile measurement is carried out with a sinusoidal wavelength-scanning interferometer where a large scanning width of 41 nm is easily achieved using a superluminescent laser diode of a wide spectral bandwidth of 46 nm. To detect a time-varying interference signal with a short integration time of 118 μs, a shutter function of a two-dimensional CCD image sensor is utilized. A step profile with a step height of 1 μm is measured with an error less than a few nanometers. A Step profile with a step height of 20 μm is also measured with a scanning width of 23 nm.

Paper Details

Date Published: 20 September 2002
PDF: 7 pages
Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); doi: 10.1117/12.465815
Show Author Affiliations
Osami Sasaki, Niigata Univ. (Japan)
Yasuhisa Shimakura, Niigata Univ. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)

Published in SPIE Proceedings Vol. 4919:
Advanced Materials and Devices for Sensing and Imaging
Jianquan Yao; Yukihiro Ishii, Editor(s)

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