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Proceedings Paper

Numerical simulation of nonlinear electric field for diamond film gowth via EACVD
Author(s): Qingxun Zhao; Hongli Xin; Qinruo Wen; Jingfa Yang; Jing Zhang; Zheng Yan
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Paper Abstract

Monte Carlo simulations are adopted to develop a numerical program to study the electron motion in the H2/CH4 gas mixture and the non-uniform electric field during diamond synthesis via Electric Assisted Chemical Vapor Deposition (EACVD) in order to understand this dynamical process. It is proved in this paper that there exists a reverse electric field near the substrate. With this reverse electric field, the effective radicals such as CH3+ and CH+ can be speeded up and impact on the substrate with a higher speed, thus increase the probability of bonding. At last the electron average energy distribution and the steady space distributions of the effective radicals such as CH3, CH3+, CH+ and H under this field distribution are given in this paper.

Paper Details

Date Published: 20 September 2002
PDF: 5 pages
Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); doi: 10.1117/12.465650
Show Author Affiliations
Qingxun Zhao, Hebei Univ. (China)
Hongli Xin, Hebei Univ. (China)
Qinruo Wen, Hebei Univ. (China)
Jingfa Yang, Hebei Univ. (China)
Jing Zhang, Hebei Univ. (China)
Zheng Yan, Hebei Univ (China)

Published in SPIE Proceedings Vol. 4919:
Advanced Materials and Devices for Sensing and Imaging
Jianquan Yao; Yukihiro Ishii, Editor(s)

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