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Proceedings Paper

Notes from the NIST/NRL/SPIE workshop on nanostructure science, metrology, and technology: microelectronics group
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Paper Abstract

We believe that the answer is yes. However, given the incredible diversity and richness of the nanoscale world, we felt that it was necessary to devise a working definition in the context of microelectronics.

Paper Details

Date Published: 24 July 2002
PDF: 4 pages
Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); doi: 10.1117/12.465494
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Published in SPIE Proceedings Vol. 4608:
Nanostructure Science, Metrology, and Technology
Martin C. Peckerar; Michael T. Postek, Editor(s)

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