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Proceedings Paper

Metrology break-out group
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Paper Abstract

Participating members: Marylyn Bennett, Bill Banke, Yues Deslandes, Tim Goldburt, Al Szeienano, Al Hatheway, Mark Schattenburg, Jay Jun, Saroshi Gonda, Mike Thompson, Kevin Lyons, Jim Potzick, Mike McElfresh, John Villarruba, George Orsi, Dominique Drouin, Alexandre Couture

Paper Details

Date Published: 24 July 2002
PDF: 5 pages
Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); doi: 10.1117/12.465472
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Published in SPIE Proceedings Vol. 4608:
Nanostructure Science, Metrology, and Technology

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