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Proceedings Paper

Power actuators for nanotechnology
Author(s): Vadim I. Rakhovsky
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Paper Details

Date Published: 24 July 2002
PDF: 12 pages
Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); doi: 10.1117/12.465224
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Vadim I. Rakhovsky


Published in SPIE Proceedings Vol. 4608:
Nanostructure Science, Metrology, and Technology

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