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Effects of etching time and wafer miscut on the morphology of etched Si(111) surfaces
Author(s): Hui Zhou; Joseph Fu; Sotoshi Gonda; Richard M. Silver
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Paper Details

Date Published: 24 July 2002
PDF: 8 pages
Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); doi: 10.1117/12.465124
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Published in SPIE Proceedings Vol. 4608:
Nanostructure Science, Metrology, and Technology

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