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Proceedings Paper

Thermal wave phase and amplitude measurements of thin metal films thickness
Author(s): A. V. Reznikov
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Paper Abstract

It is shown that for integrating control of thickness of uniform metal films along surface samples, an amplitude measuring is more promising in comparison with phase one.

Paper Details

Date Published: 1 April 2002
PDF: 6 pages
Proc. SPIE 4750, ICONO 2001: Quantum and Atomic Optics, High-Precision Measurements in Optics, and Optical Information Processing, Transmission, and Storage, (1 April 2002); doi: 10.1117/12.464471
Show Author Affiliations
A. V. Reznikov, Laser-Compact Co. Ltd. (Russia)


Published in SPIE Proceedings Vol. 4750:
ICONO 2001: Quantum and Atomic Optics, High-Precision Measurements in Optics, and Optical Information Processing, Transmission, and Storage

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