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Proceedings Paper

Photoacoustic microscopy by photodeformation applied to the determination of thermal diffusivity
Author(s): Daniel L. Balageas; Daniel M. Boscher; Alain A. Deom; Francis Enguehard; Laurence Noirot
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Paper Abstract

Photoacoustic microscopy by photodeformation can be used to generate imagery on a micrometric scale. It may be used for nondestructive testing, especially in the microelectronics industry. A quantitative application of this method is presented here, for making relative measurements of thermal diffusivity of samples of a few tens of cubic micrometers in volume. The measurement is relative because it requires a reference sample of known diffusivity. Possible applications are thin films, very small homogeneous samples exhibiting high gradients of thermal properties, thin coatings, etc. Some results are presented for bulk materials and diamond-like carbon thin coatings.

Paper Details

Date Published: 1 March 1991
PDF: 12 pages
Proc. SPIE 1467, Thermosense XIII, (1 March 1991); doi: 10.1117/12.46442
Show Author Affiliations
Daniel L. Balageas, ONERA (France)
Daniel M. Boscher, ONERA (France)
Alain A. Deom, ONERA (France)
Francis Enguehard, ONERA (France)
Laurence Noirot, ONERA (France)

Published in SPIE Proceedings Vol. 1467:
Thermosense XIII
George S. Baird, Editor(s)

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