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Proceedings Paper

Application of spectral reflectivity to the measurement of thin-film thickness
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Paper Abstract

The aim of this work is to investigate the application of the spectral reflectance technique to thickness measurement of highly localised semi-transparent coatings on miniature geometries, such as those used in the medical devices industry. The paper will describe the application of the technique to coatings on curved or non-uniform surfaces such as narrow-bore metal tubes and thin wires. The paper will describe the equipment used including a spectrometer with micro-focus attachment, and optical modelling software. This work also involved laser-drilling of the polymer films to allow complementary step-height measurements to be made. Special steps were also required to overcome problems in measurement due to the transparency of the thin films. Complementary techniques including white-light interferometry, which were used to benchmark the method, will also be described.

Paper Details

Date Published: 27 August 2003
PDF: 8 pages
Proc. SPIE 4876, Opto-Ireland 2002: Optics and Photonics Technologies and Applications, (27 August 2003); doi: 10.1117/12.464264
Show Author Affiliations
Tony Flaherty, National Ctr. for Laser Applications (Ireland)
Gerard M. O'Connor, National Ctr. for Laser Applications (Ireland)


Published in SPIE Proceedings Vol. 4876:
Opto-Ireland 2002: Optics and Photonics Technologies and Applications
Vincent Toal; Norman Douglas McMillan; Gerard M. O'Connor; Eon O'Mongain; Austin F. Duke; John F. Donegan; James A. McLaughlin; Brian D. MacCraith; Werner J. Blau, Editor(s)

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