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Proceedings Paper

Peculiarities of solid-phase silicon surface laser-induced damage in vacuum and in various gases
Author(s): Alexander F. Banishev; Vladimir S. Golubev; Alexei Yu. Kremnev
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Paper Abstract

In the paper the peculiarities of relief inhomogeneities formation on silicon surface were investigated at irradiation by submicrosecond laser pulses in various gases. It was shown that the development and relaxation time of these inhomogeneities poorly depends on a type of gas.

Paper Details

Date Published: 30 April 2002
PDF: 4 pages
Proc. SPIE 4644, Seventh International Conference on Laser and Laser-Information Technologies, (30 April 2002); doi: 10.1117/12.464127
Show Author Affiliations
Alexander F. Banishev, Institute on Laser and Information Technologies (Russia)
Vladimir S. Golubev, Institute on Laser and Information Technologies (Russia)
Alexei Yu. Kremnev, Institute on Laser and Information Technologies (Russia)


Published in SPIE Proceedings Vol. 4644:
Seventh International Conference on Laser and Laser-Information Technologies

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