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Proceedings Paper

Polar-coordinate laser writer: analysis of exposure dose distribution
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Paper Abstract

In the single point laser direct writing (LDW) process, there are differences between the exposure dose distribution and the light intensity distribution, and the differences will bring the line profile errors. In this paper, the equations to calculate the exposure dose distribution for the polar coordinate laser direct writing system are presented. The differences between the exposure dose distribution and the light intensity distribution are discussed. The line profile in the photoresist after development is predicted. The experimental results agree well with the theoretical forecast.

Paper Details

Date Published: 20 September 2002
PDF: 4 pages
Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); doi: 10.1117/12.464067
Show Author Affiliations
Yongjun Xie, Changchun Institute of Optics, Fine Mechanics, and Physics (China)
Zhenwu Lu, Changchun Institute of Optics, Fine Mechanics, and Physics (China)
Fengyou Li, Changchun Institute of Optics, Fine Mechanics, and Physics (China)
Zhicheng Weng, Changchun Institute of Optics, Fine Mechanics, and Physics (China)


Published in SPIE Proceedings Vol. 4927:
Optical Design and Testing
Zhicheng Weng; Jose M. Sasian; Yongtian Wang, Editor(s)

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