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Proceedings Paper

Fabrication of aperiodic gratings on silicon-on-insulator (SOI) rib waveguides using e-beam lithography
Author(s): Venkat Raghavan Subramanian; Ray G. DeCorby; James N. McMullin; Chris J. Haugen; Miroslav Belov
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Paper Abstract

A technique for fabricating aperiodic Bragg gratings in rib waveguides on Silicon-On-Insulator (SOI) is presented. The technique allows flexibility in defining various characteristics of aperiodic gratings so that a full range of optical grating filters can be realized. The fabrication process comprises optical and electron-beam (e-beam) lithography followed by a liftoff and a single Reactive Ion Etch (RIE) to simultaneously produce the waveguide and the embedded grating structure.

Paper Details

Date Published: 27 March 2002
PDF: 9 pages
Proc. SPIE 4654, Silicon-based and Hybrid Optoelectronics IV, (27 March 2002); doi: 10.1117/12.463856
Show Author Affiliations
Venkat Raghavan Subramanian, Univ. of Alberta (Canada)
Ray G. DeCorby, Univ. of Alberta (Canada)
James N. McMullin, Univ. of Alberta (Canada)
Chris J. Haugen, TRLabs (Canada)
Miroslav Belov, Univ. of Alberta (Slovak Republic)

Published in SPIE Proceedings Vol. 4654:
Silicon-based and Hybrid Optoelectronics IV
David J. Robbins; Ghassan E. Jabbour, Editor(s)

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