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Proceedings Paper

Single-component chemically amplified resist materials for electron-beam and x-ray lithography
Author(s): Anthony E. Novembre; Woon Wai Tai; Janet M. Kometani; James E. Hanson; Omkaram Nalamasu; Gary N. Taylor; Elsa Reichmanis; Larry F. Thompson
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Paper Abstract

Copolymers of 4-tert-butoxycarbonyloxystyrene (TBS) and sulfur dioxide (SO2) have been found to act as sensitive x-ray ((lambda) equals 14 angstrom) and moderately sensitive electron-beam, single component, chemically amplified, aqueous base soluble positive acting resists. The x-ray and electron-beam response of these materials was a function of copolymer composition, where an increase in the sulfur dioxide content enhanced the resist sensitivity. Initial investigation into the radiation induced reaction mechanism provided evidence that acid formation occurs via polymer main chain scission. It is proposed that at the scission sites radical species are produced which in turn are responsible for the formation of the acidic moieties. Heat treatment of resist films after exposure converted the copolymers to poly(4- hydroxystyrene sulfone) and permitted the exposed film areas to be developed in an aqueous base solution. Preliminary lithographic evaluation has resolved 0.5 micrometers line and space patterns in 0.65 micrometers thick 1.75/1 TBS/SO2 resist films using an x-ray dose of 10 mJ/cm2. For a resist having a composition of 2.1/1 TBS/SO2, 0.25 micrometers line and space features where delineated using an electron-beam dose of 90 (mu) C/cm2 at 30 KV. In addition, minimal surface residue of the exposed areas of the resist film after development was observed when the time interval between the exposure and the post-exposure baking steps was varied from 2-10 minutes.

Paper Details

Date Published: 1 June 1991
PDF: 11 pages
Proc. SPIE 1466, Advances in Resist Technology and Processing VIII, (1 June 1991); doi: 10.1117/12.46361
Show Author Affiliations
Anthony E. Novembre, AT&T Bell Labs. (United States)
Woon Wai Tai, AT&T Bell Labs. (United States)
Janet M. Kometani, AT&T Bell Labs. (United States)
James E. Hanson, AT&T Bell Labs. (United States)
Omkaram Nalamasu, AT&T Bell Labs. (United States)
Gary N. Taylor, AT&T Bell Labs. (United States)
Elsa Reichmanis, AT&T Bell Labs. (United States)
Larry F. Thompson, AT&T Bell Labs. (United States)

Published in SPIE Proceedings Vol. 1466:
Advances in Resist Technology and Processing VIII
Hiroshi Ito, Editor(s)

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