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Proceedings Paper

128x96 pixel field emitter-array image sensor with HARP target
Author(s): Toshio Yamagishi; Masakazu Nanba; Katsunori Osada; Yoshiro Takiguchi; Saburo Okazaki; Norifumi Egami; Kenkichi Tanioka; Mitsuru Tanaka; Shigeo Itoh
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Paper Abstract

In pursuit of developing a next-generation pick-up device having high definition and ultrahigh sensitivity features, research continues on a new type of image sensor that combines a HARP target and a field emitter array. A new field emitter array on a small-sized substrate is designed and a unique packaging technique is proposed. The prototype device is sealed in a vacuum package with a thickness of only about 10 mm and has 128 horizontal and 96 vertical pixels. Experimental results show that images could be successfully reproduced for the first time ever in a device of this type. Highly sensitive characteristics and propr resolution were also obtained with the device. The prototype image sensor can operate stably for more than 250 hours, demonstrating its feasibility and potential as a next- generation image pickup device.

Paper Details

Date Published: 24 April 2002
PDF: 8 pages
Proc. SPIE 4669, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications III, (24 April 2002); doi: 10.1117/12.463449
Show Author Affiliations
Toshio Yamagishi, NHK Science and Technical Research Labs. (Japan)
Masakazu Nanba, NHK Science and Technical Research Labs. (Japan)
Katsunori Osada, NHK Science and Technical Research Labs. (Japan)
Yoshiro Takiguchi, NHK Science and Technical Research Labs. (Japan)
Saburo Okazaki, NHK Science and Technical Research Labs. (Japan)
Norifumi Egami, NHK Science and Technical Research Labs. (Japan)
Kenkichi Tanioka, NHK Science and Technical Research Labs. (Japan)
Mitsuru Tanaka, Futaba Corp. (Japan)
Shigeo Itoh, Futaba Corp. (Japan)


Published in SPIE Proceedings Vol. 4669:
Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications III
Nitin Sampat; John Canosa; Morley M. Blouke; John Canosa; Nitin Sampat, Editor(s)

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