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Proceedings Paper

Straightness measurement of a moving table using laser beams and quadrant PSDs
Author(s): Koji Tenjimbayashi
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Paper Abstract

The straightness of a moving table consists of three rotation angle errors and two lateral displacement errors. It is well known that two lateral displacement errors can be measured by using one corner cube mirror. We have already shown theoretically that three rotation angle errors an be measured by two pairs of parallel mirrors. This paper discusses the experiment of rotation angle error measurement and shows the method is useful.

Paper Details

Date Published: 24 April 2002
PDF: 5 pages
Proc. SPIE 4669, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications III, (24 April 2002); doi: 10.1117/12.463428
Show Author Affiliations
Koji Tenjimbayashi, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 4669:
Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications III
Nitin Sampat; John Canosa; Morley M. Blouke; John Canosa; Nitin Sampat, Editor(s)

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