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Proceedings Paper

Bimorph actuators for MOEMS
Author(s): Vladislav Djakov; Syed Ejazu Huq
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Paper Abstract

Thermally activated bimorph actuators suitable for a range of MOEMS applications, that provide large deflections (up to approximately 200micrometers ) at low voltages and low power, are being developed at the Rutherford Appleton Laboratory (RAL) UK using state of the art microfabrication techniques in a variety of materials. Interdigitated bimorph cantilevers using structural materials (polyamide and gold) with different coefficients of thermal expansion (CTE) and sandwiched microheaters, curl-up from substrate due to residual stress induced during the fabrication process. The initial deflection is approximately 300 micrometers in the vertical plane and 150micrometers in horizontal plane. Operating frequency of up to 50 Hz was achieved with moderate power dissipation (4-5MW) and approximately 50micrometers displacement in vertical direction.

Paper Details

Date Published: 19 April 2002
PDF: 11 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462888
Show Author Affiliations
Vladislav Djakov, Rutherford Appleton Lab. (United Kingdom)
Syed Ejazu Huq, Rutherford Appleton Lab. (United Kingdom)


Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

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