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Proceedings Paper

LCD real-time mask technique for fabrication of arbitrarily shaped microstructure
Author(s): Qinjun Peng; Yongkang Guo; Bo Chen; Jinglei Du; Jinshan Xiang; Zheng Cui
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Paper Abstract

A new technique to fabricate arbitrarily shaped microstructures by using LCD (liquid crystal display) real- time mask is reported in this paper. Its principle and design method are explained. Based on partial coherent imaging theory, the process to fabricate micro-axicon array and zigzag grating has been simulated. The experiment using a color LCD as real-time mask has been set up. Micro-axicon array and zigzag grating has been fabricated by the LCD real-time mask technique. The 3D surface relief structures were made on pan chromatic silver-halide sensitized gelatin (Kodak-131) with trypsinase etching. The pitch size of zigzag grating is 46.26micrometers . The caliber of axicon is 118.7micrometers , and the etching depth is 1.332micrometers .

Paper Details

Date Published: 19 April 2002
PDF: 7 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462879
Show Author Affiliations
Qinjun Peng, Sichuan Univ. (China)
Yongkang Guo, Sichuan Univ. (China)
Bo Chen, Sichuan Univ. (China)
Jinglei Du, Sichuan Univ. (China)
Jinshan Xiang, Sichuan Univ. (China)
Zheng Cui, Rutherford Appleton Lab. (United Kingdom)

Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

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