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Proceedings Paper

Silicon as material for mechanical wristwatches
Author(s): Andre Perret; Arno Hoogerwerf; Philippe Niedermann; Xiao-Ming Tang; Sylvain Jeanneret; Pierre-Andre Clerc; Nico F. de Rooij; Pierre Gygax
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Paper Abstract

Silicon has been widely used as the material of choice for the fabrication of MEMS I MST devices. The compatibility of MEMS manufacturing equipment with standard IC equipment presents one ofthe main reasons for this choice. However, over the past years, we have seen new equipment dedicated to MEMS fabrication enter the market place. One such example is the Deep Reactive Ion Etcher, which is capable of vertically etching silicon at a rate of several microns per minute. This type of equipment, now available from several vendors, has revolutionized the MEMS fabrication capabilities and has opened the door to a whole new family of MEMS devices [1].

Paper Details

Date Published: 19 April 2002
PDF: 3 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462866
Show Author Affiliations
Andre Perret, Ctr. Suisse d'Electronique et de Microtechnique S.A. (Switzerland)
Arno Hoogerwerf, Ctr. Suisse d'Electronique et de Microtechnique S.A. (Switzerland)
Philippe Niedermann, Ctr. Suisse d'Electronique et de Microtechnique S.A. (Switzerland)
Xiao-Ming Tang, Ctr. Suisse d'Electronique et de Microtechnique S.A. (Switzerland)
Sylvain Jeanneret, Univ. de Neuchatel (Switzerland)
Pierre-Andre Clerc, Univ. de Neuchatel (Switzerland)
Nico F. de Rooij, Univ. de Neuchatel (Switzerland)
Pierre Gygax, Ulysse Nardin S.A. (Switzerland)


Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002
Bernard Courtois; Jean Michel Karam; Karen W. Markus; Bernd Michel; Tamal Mukherjee; James A. Walker, Editor(s)

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