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Proceedings Paper

Fully CMOS-compatible low-power microheater
Author(s): J. Laconte; C. Dupont; A. Akheyar; J. P. Raskin; D. Flandre
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Paper Abstract

An original design of a polysilicon loop-shaped microheater on a thin stacked dielectric membrane is presented. This design ensures high thermal uniformity and insulation (20.000 degree(s)C/W) and very low power consumption (20 mW for heating at 400 degree(s)C). Moreover, the use of CMOS-IC compatible TMAH-based bulk-micromachining techniques will allow easy and low cost gas sensor integration.

Paper Details

Date Published: 19 April 2002
PDF: 11 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462865
Show Author Affiliations
J. Laconte, Univ. Catholique de Louvain (Belgium)
C. Dupont, Univ. Catholique de Louvain (Belgium)
A. Akheyar, Univ. Catholique de Louvain (Belgium)
J. P. Raskin, Univ. Catholique de Louvain (Belgium)
D. Flandre, Univ. Catholique de Louvain (Belgium)


Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

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