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Proceedings Paper

2f method for the measurement of resonant frequency and Q-factor of micromechanical transducers
Author(s): V. J. Logeeswaran; Francis E.H. Tay; M. L. Chan; Fook Siong Chau; Yung C. Liang
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Paper Abstract

In this paper, the response to the first harmonic component (2f) of the electrostatic force in single terminal driven electrostatic comb-drive and parallel-plate drive was used as a signal to extract device parameters, namely, the Q- factor and resonant frequency instead of the fundamental (1f) resonance response. It is shown that the difficulty in motional measurement due to electrical cross-talk (parasitics) using 1f measurement can be overcome with a higher signal-to-noise ratio of the 2f signal. Both atmospheric (low-Q) and reduced pressure environment were investigated using off-chip electronics and lock-in amplifier. The measurements were done on the electrostatic comb-drive and capacitive parallel plate sensing plates that form the two core modules of a yaw rate sensor (dual-axis resonator). The effects of AC and DC bias voltages on the measured response have been investigated. Experimental amplitude and phase response data have been analyzed using the Lorentzian curve-fit, Resonance Curve Area (RCA) method, the half-power bandwidth method (3dB) and the Nyquist plot for data fitting and determination of the Q-factor and resonance frequency.

Paper Details

Date Published: 19 April 2002
PDF: 10 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462859
Show Author Affiliations
V. J. Logeeswaran, National Univ. of Singapore (Singapore)
Francis E.H. Tay, National Univ. of Singapore (Singapore)
M. L. Chan, National Univ. of Singapore (Singapore)
Fook Siong Chau, National Univ. of Singapore (Singapore)
Yung C. Liang, National Univ. of Singapore (Singapore)

Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

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