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Proceedings Paper

Low-cost thermal flow sensor for home-appliances applications
Author(s): N. Sabate; Isabel Gracia; Carles Cane; J. Berganzo; J. Puicorbe; Juan Ramon Morante
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Paper Abstract

A gas flow sensor has been developed for home-appliances applications. The main requirements were to obtain a low cost single device able to work in the range 0-1slm with high linearity, low power, reliability and robustness. A thermal flow sensor has been designed with the help of thermal and flow FEM simulation for the design of the sensor chip as well as its packaging. The process flow is based on a simple silicon micromachined technology. Chip-on-board solution has been selected to simplify the packaging. Electronics for driving the sensor and for compensation offsets and temperature dependence and for linearising the output signal has been implemented. Final device shows good sensitivity and linearity in different zones of the range of interest.

Paper Details

Date Published: 19 April 2002
PDF: 7 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462855
Show Author Affiliations
N. Sabate, Ctr. National de Microelectronica (Spain)
Isabel Gracia, Ctr. National de Microelectronica (Spain)
Carles Cane, Ctr. National de Microelectronica (Spain)
J. Berganzo, IKERLAN (Spain)
J. Puicorbe, Univ. de Barcelona (Spain)
Juan Ramon Morante, Univ. de Barcelona (Spain)

Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

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