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Proceedings Paper

MEMS variable optical attenuator (VOA) for DWDM applications
Author(s): Xu Ming Zhang; Ai Qun Liu; Chao Lu; Ding Yuan Tang; Fang Wang; Zishun Liu; C. Lu
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Paper Abstract

Variable optical attenuators (VOAs) have wide applications in DWDM optical communication systems, for example, equalizing the power levers of different wavelength channels, flattening the gain of optical amplifiers, etc. A MEMS variable optical attenuator with fibers connectorized has been developed using proprietary drawbridge structure, which has achieved 1.5 dB insertion loss, 45 dB dynamic range and 37 ms response time, and requires only 8 V driving voltage. Finite element model and analytical model have also been studied and compared with the experimental data, showing that the two models predict the mechanical characteristics of MEMS VOA with reasonable accuracy.

Paper Details

Date Published: 19 April 2002
PDF: 11 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462847
Show Author Affiliations
Xu Ming Zhang, Nanyang Technological Univ. (Singapore)
Ai Qun Liu, Nanyang Technological Univ. (Singapore)
Chao Lu, Nanyang Technological Univ. (Singapore)
Ding Yuan Tang, Nanyang Technological Univ. (Singapore)
Fang Wang, Institute of High Performance Computing (Singapore)
Zishun Liu, Institute of High Performance Computing (Singapore)
C. Lu, Institute of High Performance Computing (Singapore)


Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

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