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Proceedings Paper

Large-scale metal MEMS mirror arrays with integrated electronics
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Paper Abstract

Design, microfabrication, and integration of a micromachined spatial light modulator ((mu) SLM) device are described. A large array of electrostatically actuated, piston-motion MEMS mirror segments make up the optical surface of the (mu) SLM. Each mirror segment is capable of altering the phase of reflected light by up to one wavelength for infrared illumination ((lambda) equals 1.5 micrometers ), with 4-bit resolution. The device is directly integrated with complementary metal- oxide semiconductor (CMOS) electronics, for control of spatial optical wavefront. Integration with electronics is achieved through direct fabrication of MEMS actuators and mirror structures on planarized foundry-type CMOS electronics. Technical approaches to two significant challenges associated with manufacturing the (mu) SLM is discussed: integration of the MEMS array with the electronic driver array and production of optical-quality mirror elements using a metal-polymer surface micromachining process.

Paper Details

Date Published: 19 April 2002
PDF: 10 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462845
Show Author Affiliations
Thomas G. Bifano, Boston Univ. (United States)
Paul A. Bierden, Boston Micromachines Corp. (United States)
Steven Cornelissen, Boston Univ. (United States)
Clara E. Dimas, Boston Micromachines Corp. (United States)
Hocheol Lee, Boston Univ. (United States)
Michele Miller, Michigan Technological Univ. (United States)
Julie A. Perreault, Boston Univ. (United States)


Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

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