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Proceedings Paper

Monolithic tunable InP-based vertical-cavity-surface emitting laser
Author(s): Jean Louis Leclercq; Philippe Regreny; Pierre Viktorovitch; A. Bakouboula; Taha Benyattou; Isabelle Sagnes; G. Saint-Girons; C. Meriadec; Alexandru Z. Mereuta; S. Bouchoule; Antonina Plais; Joel Jacquet
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Paper Abstract

We report on the combination of the well established 1.55 micrometers monolithic VCSEL's concept with the Micro-Opto-Electro- Mechanical System (MOEMS) technological breakthrough in order to develop a novel tunable laser device for wavelength division multiplexing optical systems. Technological issures are presented for fabricating surface micromachined InP-based tunable VCSELs.

Paper Details

Date Published: 19 April 2002
PDF: 7 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462843
Show Author Affiliations
Jean Louis Leclercq, LEOM-CNRS (France)
Philippe Regreny, LEOM-CNRS (France)
Pierre Viktorovitch, LEOM-CNRS (France)
A. Bakouboula, LEOM-CNRS (France)
Taha Benyattou, LPM-CNRS and INSA de Lyon (France)
Isabelle Sagnes, LPN-CNRS (France)
G. Saint-Girons, LPN-CNRS (France)
C. Meriadec, LPN-CNRS (France)
Alexandru Z. Mereuta, LPN-CNRS (Moldova)
S. Bouchoule, LPN-CNRS (France)
Antonina Plais, Alcatel Corporate Research Ctr. (France)
Joel Jacquet, Alcatel Corporate Research Ctr. (France)

Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

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