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Proceedings Paper

Optical interferometric detection of a mechanical silicon oscillator
Author(s): Kaisa Nera; Ossi Hahtela; Sami Franssila; Ilkka Tittonen
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Paper Abstract

Mechanical oscillators that have a stable resonance with high quality factor have applications as reference oscillators, sensors and in even very sophisticated high- precision experiments for observing quantum effects. In order to obtain a high quality factor the mechanical energy dissipation has to be minimised. At atmospheric pressure the most significant loss mechanism is gas damping, but for an oscillator working in vacuum the major part of the mechanical energy losses is caused by the coupling to the support structure and by internal friction which in turn is a result of a variety of physical mechanisms like thermoelastic effects and phonon scattering. Thus a great attention should to be paid to the material choice and the oscillator design.

Paper Details

Date Published: 19 April 2002
PDF: 9 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462841
Show Author Affiliations
Kaisa Nera, Helsinki Univ. of Technology (Finland)
Ossi Hahtela, Helsinki Univ. of Technology (Finland)
Sami Franssila, Helsinki Univ. of Technology (Finland)
Ilkka Tittonen, Helsinki Univ. of Technology (Finland)

Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002
Bernard Courtois; Jean Michel Karam; Karen W. Markus; Bernd Michel; Tamal Mukherjee; James A. Walker, Editor(s)

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