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Proceedings Paper

Optical interferometric detection of a mechanical-silicon oscillator
Author(s): Kaisa Nera; Ossi Hahtela; Sami Franssila; Ilkka Tittonen
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Paper Details

Date Published: 19 April 2002
PDF: 9 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462841
Show Author Affiliations
Kaisa Nera, Helsinki Univ. of Technology (Finland)
Ossi Hahtela, Helsinki Univ. of Technology (Finland)
Sami Franssila, Helsinki Univ. of Technology (Finland)
Ilkka Tittonen, Helsinki Univ. of Technology (Finland)


Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

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