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Proceedings Paper

Characterization of MEMS by feedback interferometry
Author(s): Valerio Annovazzi-Lodi; Sabina Merlo; Michele Norgia; Guido Spinola; Benedetto Vigna; Sarah Zerbini
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Paper Abstract

In this paper, we report on feedback interferometric measurements on a micromachined gyroscope and on a micromachined linear accelerometer. Characterization has been performed for different values of pressure and of other parameters using a laser diode. Resonance frequencies and quality factors have been measured. Moreover, hysteresis and other nonlinear phenomena on specific samples have also been detected. The proposed method is based on optical injection and represents an efficient alternative to the standard electrical measurements, which actually shows some limitations for bare prototype testing.

Paper Details

Date Published: 19 April 2002
PDF: 10 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462839
Show Author Affiliations
Valerio Annovazzi-Lodi, Univ. degli Studi di Pavia (Italy)
Sabina Merlo, Univ. degli Studi di Pavia (Italy)
Michele Norgia, Univ. degli Studi di Pavia (Italy)
Guido Spinola, STMicroelectronics (Italy)
Benedetto Vigna, STMicroelectronics (Italy)
Sarah Zerbini, STMicroelectronics (Italy)


Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

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