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Proceedings Paper

Tolerance analysis and synthesis in microsystems
Author(s): Christophe Germer; Ulli Hansen; H.-J. Franke; Stephanus Buettgenbach
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Paper Abstract

The large variety of the technologies and physical, chemical or biochemical effects united in micro systems requires a new generation of quality assurance. An appropriate quality management should check all conceivable influences on the product and perform a complete tolerance synthesis based on its function and with regard to manufacturing and cost optimization. In the following, a new approach to function-oriented tolerance analysis and synthesis is presented. The Institutes for Engineering Design and Micro Technology in Braunschweig, Germany, have developed a computer program, which assists Design Engineers in tolerance analysis and synthesis in micro technology. This contribution presents the theoretical background of this software. For a better understanding two short MEMS examples are shown.

Paper Details

Date Published: 19 April 2002
PDF: 10 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462832
Show Author Affiliations
Christophe Germer, Technische Univ. Braunschweig (Germany)
Ulli Hansen, Technische Univ. Braunschweig (Germany)
H.-J. Franke, Technische Univ. Braunschweig (Germany)
Stephanus Buettgenbach, Technische Univ. Braunschweig (Germany)

Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

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