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Proceedings Paper

New approach for 3D capacitance extractions for complex structures with conformal dielectrics
Author(s): Andrey Ushakov; Irina Landman; Igor Balk
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Paper Abstract

This paper describes a new approach for 3-D capacitance extraction using the boundary element method. The new formulation described in this paper improves condition number of the linear system to be solved and reduces the number of unknowns in the system. Implementation of the described method, in conjunction with an acceleration algorithm, will significantly reduce the computational time and memory required for the simulation of electrostatically actuated MEMS devices.

Paper Details

Date Published: 19 April 2002
PDF: 8 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462829
Show Author Affiliations
Andrey Ushakov, Corning Ltd. (Russia)
Irina Landman, Corning Ltd. (Russia)
Igor Balk, Corning IntelliSense Corp. (United States)

Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

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