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Proceedings Paper

Perspectives of microsystem engineering development in Russia
Author(s): Petr P. Maltsev
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Paper Details

Date Published: 19 April 2002
PDF: 10 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462828
Show Author Affiliations
Petr P. Maltsev, Moscow State Institute of Radio Engineering, Electronics and Automation (Russia)


Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

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