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Proceedings Paper

Perspectives of microsystem engineering development in Russia
Author(s): Petr P. Maltsev
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Paper Abstract

Modem status of technique of new generation and "critical" technologies in a number of the most developed countries is characterized by Microsystem technology dynamic development from the beginning of the 90-th years ("microsystems technology " - MST) that determined the creation of a new scientific and technical direction - "microsystem engineering " ("mirosystems engineering " MSE).

Paper Details

Date Published: 19 April 2002
PDF: 10 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462828
Show Author Affiliations
Petr P. Maltsev, Moscow State Institute of Radio Engineering, Electronics and Automation (Russia)

Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002
Bernard Courtois; Jean Michel Karam; Karen W. Markus; Bernd Michel; Tamal Mukherjee; James A. Walker, Editor(s)

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