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Proceedings Paper

Frequency-selective silicon vibration sensor with direct electrostatic stiffness modulation
Author(s): Dirk Scheibner; Juergen Wibbeler; Jan Mehner; Birgit Braemer; Thomas Gessner; Wolfram Doetzel
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Paper Details

Date Published: 19 April 2002
PDF: 8 pages
Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); doi: 10.1117/12.462827
Show Author Affiliations
Dirk Scheibner, Technische Univ. Chemnitz (Germany)
Juergen Wibbeler, CADFEM GmbH (Germany)
Jan Mehner, Technische Univ. Chemnitz (Germany)
Birgit Braemer, Technische Univ. Chemnitz (Germany)
Thomas Gessner, Technische Univ. Chemnitz (Germany)
Wolfram Doetzel, Technische Univ. Chemnitz (Germany)

Published in SPIE Proceedings Vol. 4755:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002

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